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Delivery and installation of an ICP Reactive ion etcher for silicon dielctrics
Delivery and installation of a ICP Reactive ion etcher for silicon dielctrics — original title
Your path to submission
- Deadline: 23 November at 23:55 — 22 days left.
- The submission point is stated in the notice (link on this page).
- Offer and evidence in: English.
- Collect your evidence — the eligibility requirements are listed on this page; for many of them the analysis explains how to obtain them.
What the buyer is looking for
DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for oxides and nitrides of silicon to become its new primary instrument for 150 mm wafer processing. Delivery is expected no later than Q3 2027. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients. As an open access tool, the Instrument must support the full spectrum of etching of silicon-based dielectrics, from sub 100 nm nanostructures defined by electron beam lithography to depths of several tens of microns. Meeting these demands requires exceptional process controllability and tunability: the system must perform ultra precise, low-rate etches (< 100…
Show full description
… nm/min) with smooth and straight sidewalls and minimal undercut for shallow features, alongside high etch rate deep etches (approaching 500 nm/min). It must also accommodate all silicon dielectrics of the form SixNy, SixOx and SixOyNz, and be compatible with mask materials including Si, Cr, e-beam resists and UV/DUV photoresists with high mask selectivity for all these masking materials. The user interface must be intuitive and user friendly. The Instrument should be engineered to the highest industrial standards to minimize maintenance, and any required servicing must be straightforward and efficient. The instrument must be configured for 150 mm wafer processing and a complete kit enabling the processing of 200 mm wafers must be included in the tender as an option. Furthermore, DTU will have the option to purchase one more ICP Reactive ion etcher for silicon dielctrics identical to the initial instrument.
Contract
Type of service
Clement What the numbers say about this buyer
- In this sector the buyer awards roughly every 6 months (7 awards, most recently August 2026) — the next award is due around January 2027 by that rhythm. The last award went to DAVEY PRODUCTS.n = 7
- 43% of awards went to companies from abroad (276 awards with a known winner country). Sector average: 22%.n = 276
- 6% of this buyer's awards went to companies that had already won here before (276 awards since 2018, spread over 122 companies). 94% went to new names.n = 276 awards since 2018
- The median procedure drew just one bid (246 procedures with a bid count); 52% ended with a single bidder. Sector: median 2 bids.n = 246
- The award came in at a median 101% of the estimated value (32 awards with both estimate and value) — pricing at the estimate is usually about right here.n = 32
From this buyer's documented awards; comparison values from the same sector and country. Not a forecast, not legal advice. As of 01/11/2026.
Selection criteria — via the ESPD
The buyer states in the notice that eligibility is proven through the European Single Procurement Document (ESPD); the concrete requirements are in the tender documents. The document analysis below extracts them from there — bid and evidence in English.
Tender documents — direct download
Who has won at this buyer so far
Across all contract types of this buyer — not just this sector. A city buys software and fire engines through the same purchasing office.
| Company | Awards | Period |
|---|---|---|
| Waters A/S | 4 | 2024–2025 |
| VWR International A/S | 3 | 2025–2026 |
| Th. Geyer Danmark ApS | 2 | 2025 |
| LanzaTech Inc | 2 | 2025–2026 |
| Thermo Electron A/S | 2 | 2024–2026 |
How often this buyer tenders this kind of work
Tactics
When this buyer has awarded in this sector, there was usually a single bid in the end. A solid bid has a real chance here. (Based on 7 completed awards — not a statement about this procedure.)
The deadline falls on a Monday — your last full working day is the Friday before. Have evidence and guarantees together by Thursday.
Foreign bidders
In Denmark, 2,229 contracts went to foreign companies over the last 3 years (of 14,448 recorded awards) — mostly from Germany, Sweden, Finland.
Submission language: English.
How to bid
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