Deposition Tool 8 Inch
Germany · Garching
What the buyer is looking for
The Technical University of Munich - Chair of Technical Physics E23/WMI will acquire a UHV cluster System for the fabrication of superconducting circuits on 8 inch'' wafers. The system must provide UHV conditions and has to include an HV load-lock chamber, a central handling chamber, a UHV chamber for the evaporation of Al thin films, a UHV chamber for sputtering of superconductors, a UHV chamber for oxidation, a UHV chamber for Ar ion milling, and a flipping station. The system must allow metalizing both sides of the wafers in situ, with minimal backside particle contamination. The wafers should only be touched on the side (edge gripping).
Description as published (DE).
Contract
BuyerLehrstuhl für Technische Physik E23, TUM
TypeSupplies
Estimated valuevalue not published
Published21 August 2026
CategoryLaboratory & optical equipment · CPV 38000000
How often this buyer tenders this
202214
20254
20261
Who knows the rhythm prepares instead of reacting.
44
days until the deadline — Monday 5 October at 00:00
How to bid
Read the full notice — Original + documents
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